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Antireflection Behavior of Multidimensional Nanostructures Patterned Using a Conformable Elastomeric Phase Mask in a Single Exposure Step Park, Junyong; Yoon, Sanghoon; Kang, Kisuk; Jeon, Seokwoo, SMALL, v.6, no.18, pp.1981 - 1985, 2010-09 |
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